Automation Equipment


plastic injection molding
FOUP/Cassette Cleaning Machine
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  • Suitable for 12-inch wafer FOUP/FOUP INSERT products.
  • Fully automatic washing and drying, with interchangeable cleaning frames based on product type.
  • Supports SECS/GEM and can store parameters for 99 sets of products, each with 9 functional settings.
  • Heating tank: 20 LPM; 60℃.
  • Rotation speed: 5 to 250 RPM.