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Automation Equipment
FOUP/Cassette Cleaning Machine
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Suitable for 12-inch wafer FOUP/FOUP INSERT products.
Fully automatic washing and drying, with interchangeable cleaning frames based on product type.
Supports SECS/GEM and can store parameters for 99 sets of products, each with 9 functional settings.
Heating tank: 20 LPM; 60℃.
Rotation speed: 5 to 250 RPM.
Iron Frame Film Lamination Machine
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Substrate Lamination Machine
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